NEW Ilion+™: A Breakthrough in SEM Planar Surface Preparation

Model 693 Ilion+™

Pleasanton, CA, April 11, 2010. Gatan, Inc. is pleased to introduce the NEW Ilion⁺™, a significant advance in the preparation of large planar cross sections for microscopic imaging and microanalysis. The Ilion⁺ is a dedicated, ion beam based system for the preparation of large area planar cross sections from challenging SEM samples. The Ilion⁺ uses a proprietary milling system that exposes significantly greater areas than traditional FIB milling while encompassing a wider range of delicate samples not compatible with mechanical polishing and other techniques. The system is easy to install and operate allowing users to begin making samples quickly. The Ilion⁺ design is based on the proven Gatan PIPS™ (Precision Ion Polishing System). 

"Our beta results for the Ilion⁺ confirm our economic model predictions of a threefold reduction in cost per sample when compared to FIB," reports Kevin Scudder, General Manager, Gatan, Inc.

SEM cross-sectional image of C4 bump prepared at 6 keV, in 3 hours using Gatan Ilion+.

For complete information on the new Ilion⁺, please click here or contact your local Gatan Sales office.