XuM: SEM HOSTED X-RAY MICROSCOPE
January 11, 2006
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XuM 3D tomographic reconstruction of a CeramisphereTM with corresponding SEM image (inset). Images courtesy of Dr Sherry Mayo, CSIRO Division of Manufacturing Infrastructure and Technology, Australia. Sample provided by Ceramisphere Pty Ltd, Australia.
Gatan Inc. recently launched a new addition to its range of imaging products for the SEM: the XuM. Originally developed by CSIRO and XRT Limited in Australia, the XuM utilises a scanning electron microscope (SEM) as a host instrument to enable x-ray imaging of the internal structure of objects with resolutions down to less than 100nm. X-ray images generated in the XuM take advantage of both absorption and phase contrast to reveal fine structure and edge definition in a wide range of sample materials from semiconductor devices to low density polymer composites and biological specimens. Using the XuM, the ability to perform 2D and full 3D tomography means that complex internal structures can be explored without ever needing to cross-section the sample.
Gatan Inc. is the world's leading manufacturer of instrumentation and software used to enhance and extend the operation and performance of electron microscopes. The Gatan name is recognized and respected throughout the worldwide scientific community and has been synonymous with high quality products and the industry's leading technology.
