655 Turbo Pumping Station

Clean, fast, reliable pumping performance

The Model 655 is a completely self-contained, compact, bench top pumping station designed for TEM applications. It incorporates the latest diaphragm pump and turbo drag pump technologies to produce a clean vacuum in the 5E -6 Torr range. Pumping times from atmosphere to near base pressure are typically less than 2 minutes; pressure monitored by a simple, reliable CC gauge.

Quiet, efficient, user friendly

The modular approach of this high vacuum turbo pumping station adds more versatility. A valve column containing two large butterfly valves is mounted directly atop the drag pump making it possible to isolate the vacuum pumps from the work modules. The valve column permits various pumping combinations and can be controlled to remain under vacuum when power is switched off. Simple and easy to use, the Model 655 comes complete and ready to use; plug it in and turn it ON.

The TEM holder module offers intelligent design solutions for your cryo-TEM needs and is the perfect compliment to Gatan cryotransfer holders.

The sample storage module offers a simple and efficient solution to the prevention of corrosion and contamination of critical TEM samples (copper technology) while waiting microscope time.

TEM Holder Module

Applications:

• Vacuum storage of TEM holders
• Testing the functionality of heating, tilt and cryoholders
• Evacuation of dewar type cryotransfer holders
• Removing condensed water from cold holders
• Testing vacuum transfer holders

The pumping station is designed for evacuating and leak checking specimen holders from all TEM manufacturers. Tilting and heating operations can be viewed through a Pyrex glass work chamber while the sample is under vacuum. Two butterfly valves make it possible to isolate either the specimen holder or the pumping port normally used for dewar evacuation.

A total of 4 TEM holder modules can be fitted to the workstation. A second shut-off valve is required for pumping dewar’s if a third and fourth module are added.

The pumping station will not contaminate the zeolite traps used in Gatan cooling holders even when the dewar is filled with liquid nitrogen. The turbo drag pump, valve column and specimen holder will remain under vacuum when the power is switched Off. The efficient performance of the vacuum pumping station enables the ultimate vacuum to be achieved within minutes after starting.

Sample Storage Module

Applications:

• Vacuum storage of 3mm TEM samples
• Each Sample Storage Module can store 12 TEM samples
• A module consists of 2 individualvacuum capsules
• Each vacuum capsule can be individually vented or evacuated
• Each capsule holds a 6-grid array
• Each 6-grid array is removable for transport to the TEM

The sample storage module provides high vacuum storage of finished TEM samples prior to viewing in the TEM. This is particularly important for copper technology semiconductor samples. Vacuum storage preserves copper lines on the sample backside eliminating data distortion from copper corrosion.

Specifications

Vacuum
  • Pumping System: Two stage diaphragm pump backing a 70l/sec Turbo Drag Pump.
  • Pressure: 2E -6 Torr (2.7E -4Pa) Base
  • Vacuum Gauge: Cold Cathode for work column solid state sensor for backing pressure

  • Dimensions
  • Overall Size: 420mmW x 265mmD x 345mmH (single module) (16.5”W x 10”D x 14”H)
  • Shipping Weight: 20kg (44lbs)
  • Power Requirements: Universal voltage 100VAC – 240VAC, 50/60 Hz. User to specify voltage to insure correct line cord.
  • Power Consumption: 300 Watts
  • Warranty One year

    Click here to download a PDF of the 655 Turbo Pumping Station datasheet.

     

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