32 nm Transistor device
![Fast joint EELS / EDS color map across a 32 nm transistor device Fast joint EELS / EDS color map across a 32 nm transistor device](https://www.gatan.com/sites/default/files/Fast-joint-EELS_EDS-color-map-across-a-32-nm-transistor-device.png)
Paolo Longo, Ph.D., Gatan, Inc.
Sample courtesy of Dr. Pavel Potapov at Global Foundries, Dresden, Germany
Microscope courtesy of Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA
Acknowledgements to Dr. P. Rice and Dr. T. Topuria at IBM (Almaden), San Jose, CA for helping set up microscope for experiment.