Enfinium™ spectrometers provide the technology of the GIF Quantum® energy filters in a dedicated spectrometer system. Redesigned from the ground up, the GIF Quantum filter combines advanced dodecapole-based electron optics with a blazing fast CCD camera system to yield an imaging filter that defines the new state-of-the-art in the capture of both highly detailed electron energy loss spectroscopy (EELS) and energy-filtered transmission electron microscope (EFTEM) data sets with maximum throughput.
Enfinium spectrometers provide the advanced EELS capability of GIF Quantum filters without the added expense of imaging and energy-filtered modes on the system. Two models are available to provide either basic EELS functionality or a fully enabled EELS system.
- Acquire spectra with unprecedented exposure control and dynamic range with the electrostatic shutter
- High speed, dose-efficient scanning transmission electron microscope (STEM) EELS spectrum imaging for detail rich mapping at 1000 spectra/s
- Simplified operation over most applications using fixed 3 mm entrance aperture
- Improved collection efficiency for aberration corrected STEM EELS using 2.5 and 5 mm entrance apertures
- 60 – 300 kV operation for a broad range of operating modes and configurations
- Capture a broader range of edges in a single spectrum for simplified quantification
- Measure precise energy shifts and apply advanced quantification routines for a new level of EELS analysis using DualEELS™ capability
- Improve spectral linearity for outstanding energy resolution with dodecapole-based optics
Enfinium SE—Workhorse EELS system combining simplified operation and spectral speed suitable for most basic EELS operations. System provides 3 mm fixed position EELS aperture, and base package provides 100 spectra/s rate in spectroscopy.
Enfinium ER—High performance EELS system incorporating the advanced features of the GIF Quantum ER filter in a dedicated spectrometer. System comes standard with 2.5 mm and 5 mm spectroscopy apertures, electrostatic shutter, and the advanced spectroscopy modes of the US1000XP/FT camera system.
Enfinium dedicated EELS systems
|Fixed 3 mm entrance aperture||√|
|2.5 and 5 mm entrance apertures||√|
|60 – 300 kV operation||√||√|
|2000 eV EELS range||√|
- Nanocathodoluminescence reveals the optical properties of III-nitride light emitting diodes
- Chemical and compositional analysis of 3D NAND and FinFET devices
- STEM alignment for EELS analysis
- STEM imaging setup with the DigiScan system
- Jointly acquired HAADF and MAADF signals
- EELS analysis of metal segregation across grain boundary in Yttria-stabilized Zirconia (YSZ) – investigating oxygen vacancies
- Fast atomic DualEELS color map across the SrTiO3/SrMnO4 interface
- Fast DualEELS color map of a AuGeNi metal alloy ohmic contact for the fabrication of III-V transistor device structures; absolute compositional analysis also carried out
Models 976, 977
Atomic level EELS mapping using high energy edges in DualEELS™ mode
High-speed EELS composition analysis, in DualEELS mode, of metal alloy ohmic contacts for the fabrication of III-V MOSFET devices
EELS: A tool for investigating biological materials
Fast simultaneous acquisition of low- and core-loss regions in the EELS spectrum from catalyst particles containing the heavy metals Au and Pd using the GIF Quantum® system
Fast STEM spectrum imaging using simultaneous EELS and EDS in Gatan Microscopy Suite® software
Review of recent advances in spectrum imaging and its extension to reciprocal space
The use of MLLS fitting approach to resolve overlapping edges in the EELS spectrum at the atomic level
Fast STEM EELS spectrum imaging analysis of Pd-Au based catalysts
The high efficiency of the latest generation EELS spectrometers allow highly detailed EELS spectra from heavy elements to be acquired in a matter of milliseconds resulting in composition maps with outstanding information content.
High- speed composition analysis of high-z metal alloys in DualEELS mode
Demonstrating that high speed atomic EELS composition maps with high contrast and high signal-to-noise ratio can be acquired routinely from high-energy edges.
Fast atomic level EELS mapping analysis using high energy edges in DualEELS mode
Demonstrating that atomic EELS mapping using high energy edges is very effective. The high signal-to-background ratio of high-energy edges leads to simplified data extraction.
(reported @ 200 kV)
|Enfinium SE||Enfinium ER|
|Energy resolution* (eV FWHM)||0.40||0.10|
|Aperture size (mm)||3.0||2.5 / 5|
|Energy field of view (eV)||1000||2000|
|Spectral rate (1/s)||100||>1000|
|Fast spectroscopy modes||Optional||√|
|1 µs electrostatic shutter||Optional||√|
|Advanced BF/DF detector||Optional||Optional|
Advanced AutoFilter® suite software
Advanced BF/DF detector
Advanced STEM detectors
High speed 2 kV spectrum offset module, model 963.U4
High speed camera and shutter, model 976.U1
STEMPack™ with advanced BF/DF detector, model 963.U5
STEMPack high speed spectrum imaging upgrade, model 777.U2
STEMPack high speed EDS acquisition upgrade, model 777.U3