Complete multielement composition analysis with simultaneously collected EDS and EELS

Gatan instruments 

eaSI™ is an exclusive technology from Gatan that delivers the most efficient and effective workflow for advanced STEM experiments. eaSI leverages EDAX EDS Powered by Gatan (the EDAX^® Elite T Super detector to maximize collection efficiency and optimize light element performance with complete DigitalMicrograph^® software integration) and the GIF Continuum^® system (exceptional sensitivity and collection efficiency for high-quality EELS).

Background

3D NAND memory’s complex architecture requires detailed characterization to confirm the structure and identify failure methods. Elemental mapping, quantification, and chemical state determination are all necessary to form a complete analysis. With eaSI technology, energy dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) spectra can be combined and synchronized during STEM imaging to provide complementary information. Collecting high energy resolution EELS provides the unique ability to determine chemical state via fine structure analysis. Still, the required energy resolution may limit the energy range and detectable elemental edges. In these cases, simultaneously collected EDS completes the analysis by including spectral information from elements outside the working EELS energy range.