Integrated SEM

Step 1: Setup and align the sample

Prepare the sample so it is flat, polished, and mounted on holders or stubs, If necessary. Non-conductive samples may require a coating to eliminate charging effects that could cause image distortion or drift. The best way to accomplish this is to utilize a fully automated argon ion polishing system, like the PECS™ II instrument.

A PECS II instrument can produce damage-free surfaces, cross-sections, and deposit coatings to protect or eliminate charging.

Once placed in the SEM chamber, use integrated imaging tools to locate and focus on the region of interest.

Step 2: Configure parameters and capture integrated data

Set scanning parameters for EDS, EBSD, BSE, CL, and/or WDS, including resolution, dwell time, and excitation conditions.

Then, use EDAX^® APEX™ (or DigitalMicrograph^®) software to simultaneously acquire chemical, optical, and/or crystallographic data across all modalities.

Step 3: Transform raw data into meaningful insights

Process raw spectra and diffraction patterns to generate elemental, orientation, and phase maps.

Apply advanced algorithms for peak deconvolution and pattern indexing, then correlate chemical and structural data to uncover insights beyond the reach of individual techniques.

Step 4: Generate and share reports with visual and quantitative results

Use EDAX APEX, OIM Analysis™, or other reporting tools to generate customizable reports featuring maps, spectra, and quantitative results.

Export the data in standard formats like PDF or Office for easy documentation, collaboration, and further analysis.