Live EDS mapping in DigitalMicrograph with EDAX Elite T Super

Gatan instrument used

eaSI™ is an exclusive technology from Gatan that delivers the most efficient and effective workflow for advanced STEM experiments. eaSI leverages EDAX^® Elite T Super detector (EDAX EDS Powered by Gatan) to maximize collection efficiency and the DigitalMicrograph^® software, a workflow-based interface for the shortest time to results.

Background

Samples with complex chemistry and architecture, like 3D NAND memory, require detailed characterization to confirm their structure or identify failure methods. EDS elemental mapping is useful for analyzing semiconductor samples prepared via lengthy fabrication processes. eaSI improves the EDS data collection workflow by allowing users to display elemental map results during live EDS data collection in DigitalMicrograph. As a result, the user can confirm in real-time if the chosen acquisition conditions are satisfactory, check if the signal-to-noise in the EDS data is appropriate, and choose when a sufficient signal is present in the elemental maps to complete data acquisition.