How to correlate Micro-XRF and SEM-EDS for optimal x-ray characterization of materials

Micro x-ray fluorescence (Micro-XRF) is a non-destructive analytical technique that utilizes the benefits of conventional XRF while implementing micro-spot x-rays with a moveable stage. It does not require sample preparation and coating, and the sample shape and height can be irregular. This technique improves detection limits for higher Z elements and greater analysis depth than can be achieved with energy dispersive spectroscopy (EDS) in a Scanning Electron Microscope (SEM). SEM-EDS has higher light element sensitivity and is more appropriate for smaller-scale features and more precise locations. Both techniques allow spectrum acquisition, linescan, and mapping. This webinar will look at the relative advantages of SEM-EDS and benchtop Micro-XRF analysis and suggest how the two techniques can be used together for the optimal x-ray characterization of materials.