
Breaking through EDS limitations: A study on using WDS for silicon wafer contaminant detection
April 15, 2025
Element density: 19.25 g/cm3
Electron configuration: [Xe]4f145d46s2
Oxidation states: +6

A quick-reference for exploring x-ray peak intensities across element series (K, L, M, N) to support accurate EDS analysis in electron microscopy.
| K-Series | L-Series | M-Series | N-Series | ||||
|---|---|---|---|---|---|---|---|
| Kα | 59.305 | Ll | 7.385 | Mz | 1.383 | N | 0.215 |
| Kβ | 67.372 | Ln | 8.722 | Mα | 1.774 | ||
| Lα1 | 8.394 | Mβ | 1.835 | ||||
| Lβ1 | 9.669 | Mγ | 2.035 | ||||
| Lβ2 | 9.957 | M2N4 | 2.314 | ||||
| Lγ1 | 11.282 | ||||||
| Lγ2 | 11.605 | ||||||
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