Chemical and compositional analysis of 3D NAND and FinFET devices
Learn how the complementary nature of electron energy loss spectroscopy (EELS) and energy dispersive spectroscopy (EDS) signals makes it highly desirable to acquire both during transmission electron microscope (TEM) investigations of materials. With ongoing improvements in electron instrumentation and detectors, it is now practical to acquire joint EELS-EDS spectrum image data for materials analysis all the way from large area mapping down to atomic scale analysis. In this tutorial we will present data over a range of different experimental conditions that show the complementary nature of the techniques and highlight the strength of each. In particular, the attention of this tutorial will be focused on the chemical and compositional analysis of samples obtained from some of the latest generation 3D NAND memory and also FINFET semiconductor devices currently available in the market.