組成分析
共通の課題
強度、柔軟性、光透過性、熱伝導率に優れた新素材に大きな注目が集まっています。これらを新製品に組み込む前に、新素材、表面と界面、ナノ構造、クラスター、厳しい条件下での材料について理解し、採用し、そして故障を原子分解能レベルで予測することは極めて重要です。特に、各成分と構造に関する特性との間の関係と、材料構造と成分分布における著しい変化を明確に説明することができるこれらの相乗作用を理解できるため、組成分析は重要なツールとなります。理解すべき有益な組成に関連した情報は次のとおりです。
- 存在する元素
- 元素の量
- サブナノメートルの分解能で各元素が存在する位置
- 特定の二次元または三次元領域に存在する各元素の相対濃度
- 物質の電気特性
革新的な手法
製品や試料の構成物質の特性を的確に評価し、理解するには、まず最初に、材料界面を識別できるように各試料が高品質であることと、必要に応じて環境刺激下で処理できるように各試料が適切に管理されていることが重要です。試料を作製したら、材料の微細構造をより深く理解するためにいくつかの手法を利用できます。
原子分解能の化学および組成分析。
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ナノメートルレベルの分解能で像内の元素と化学物質を強調しマッピングを行い定量化するイメージング手法の1つ。
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EELSデータの空間分布を生成するための体系的な方法。
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材料の成長、素子の超微細構造と不具合を理解するのに役立つ、権威ある賞を受賞した高分解能イメージングツール。
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顕微鏡レベルで材料の化学特性および電子特性について独自の知見を得ることができる。
For more information, visit WhatIsCL.info.
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独自のSEM、TEM、またはSTEMアプリケーション用に試料を切削、エッチング、研磨、および凍結するための高性能ツール。
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試料の元素または化学特性を解明するのに役立つ。
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材料の結晶方位や組織を調べるのに役立つ。
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関連するアプリケーションについては、「化学分析」または「金属および合金」をご覧ください。
結果の活用
試料に含まれている元素
この例では、EELS手法を使用してYエッジおよびZrエッジを取得してマッピングし、MLLSフィッティングを使用してCe3,4原子マップを取得しています。この画像の総取得時間は244秒で、全スペクトルを400~2400 eVのSingleRangeモードで取得しています。ビーム電流は125 pA、エネルギー分解能は3 eVでした。
AuGeNi オーミック接点は、接点の抵抗が小さく、一般にIII-V MOSFET素子の製造に適しているため、広く使用されています。しかし、III-V回路基板にAuが拡散するため、均一性に劣るという短所があります。この拡散は、Au、Ge、Niのデポジション後の焼きなまし処理時の温度に依存します。EELS手法やEFTEM手法を使用すると、III-V回路基板との接合部分に存在する物質と接合部分の粗さが素子の性能にどのように影響するのかを調べることができます。試料はグラスゴー大学様、顕微鏡はアリゾナ州立大学(アリゾナ州、テンピ)のRay Carpente教授のご厚意によるものです。実験を行う際の顕微鏡の設定は、Jeol USA(現在のASU)のToshiro Aoki博士にご協力いただきました。
組成均一性の測定
カソードルミネッセンスを使用すると、材料組成における粒子間のばらつきを区別できます。この例では、色の変化でばらつきが示され、粒界における過度の空孔欠陥は青色で示されています。画像a)は、Cu0.8In0.2AgSe2薄膜の二次電子像を示しています。画像b)は、カソードルミネッセンスの単色画像に1.181 eVの放出(青色)、1.121 eV(緑色)、1.033 eV(赤色)を重ねた画像を示しています。画像はイリノイ大学のA.R. Aquino Gonzales様のご厚意によるものです(博士号論文)。
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Hand book of nanoscopy
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Langmuir2006Horiuchi, S.; Dohi, H. -
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Nanoscale analysis of polymer interfaces by energy-filtering transmission electron microscopy
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On resolution in electron tomography of beam sensitive materials
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Complete composition tunability of InGaN nanowires using a combinatorial approach
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TEM studies of Nb2O5 catalyst in ball-milled MgH2 for hydrogen storage
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In situ analysis of gas composition by electron energy-loss spectroscopy for environmental transmission electron microscopy
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TEM-EELS study of natural ferrihydrite from geological-biological interactions in hydrothermal systems
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Advanced synthesis of materials for intermediate-temperature solid oxide fuel cells
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Imaging and quantifying the morphology of an organic–inorganic nanoparticle at the sub-nanometre level
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Aberration-corrected transmission electron microscopy analyses of GaAs/Si interfaces in wafer-bonded multi-junction solar cells
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Electron microscopy analysis of Ti-substituted Li2MnO3 positive electrode before and after carbothermal reduction
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STEM characterization for lithium-ion battery cathode materials
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New method for detection of Li inside He bubbles formed in B10-alloyed steel after neutron irradiation
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