The effect of pattern size and sensitivity to noise refinement in EBSD patterns
Instruments used
EDAX® OIM Analysis™ software and EDAX OIM Matrix™
Background
The precision and accuracy of orientation measurements by electron backscatter diffraction (EBSD) have been of interest since the advent of EBSD [1,2]. EDAX scientists have continued to explore orientation precision after automation of the EBSD technique [3,4]. Refining EBSD orientation measurements can dramatically improve the results. EDAX uses a refinement method that is essentially a hybrid of that proposed by Singh, Ram, and De Graef [5] and Pang, Larsen, and Schuh [6]. In OIM Analysis 9, the use of spherical indexing and an additional refinement in the harmonic frequency space have been implemented to improve the results further.