Monarc CL system and the analysis of microLEDs

Learn how we can determine the emission pattern by color from a (micro-) LED using the unique analysis capabilities of the Monarc cathodoluminescence detector. What’s more, direct correlation of structure, composition, and nanoscale optical properties can be performed in the same tool.

Counting First Electrons - ZIF-8 MOF

Accumulation of electron counts into a single image of a ZIF-8 MOF using a Gatan K2 summit camera. The image was acquired with 120 individual frames over 3s, with a dose rate of 1.4 e-/Å2/s and total dose of 4.1 e-/Å2.

Monarc CL Detector: Polarization-Filtered CL

Advanced filter wheel with rotatable linear polarizer enables polarization-filtered CL maps, wavelength spectra, angle-resolved patterns, plus wavelength- and angle-resolved spectra. Determine the emission polarization properties.

New CL modes of operations for analysis with Monarc

New capabilities including angle-resolved (AR)CL, wavelength- and angle-resolved (WAR)CL, and polarization filtering.

Up to 5x higher throughput (at same spectral resolution)

Best-in-class spectrograph allows larger slits, increasing fluence. Consequential decrease in acquisition times – Previously limited by signal-to-noise ratio. Collect spectra with better resolution and peak-to-background ratio.

Automate capture of wavelength and angular distributions with WARCL

Enables parallel detection of wavelength and emission angle from >60% of the emission hemisphere. Delivers almost complete measurement of the emission properties of LEDs and display pixels. Energy-momentum spectroscopy for nanophotonic applications.

Monarc CL Detector: Wavelength Spectrum Imaging

Monarc’s novel wavelength-filtered spectrum imaging mode delivers higher spatial sampling of hyperspectral data, in less time while avoiding drift and electron-dose artifacts. The detector is ideal for geoscience applications.

Minimize surface damage and maintain the integrity of silicon

After plasma cleaning with the Solarus II, there is minimal amorphous surface damage and the sample integrity is maintained. Protocol: hydrogen and oxygen; duration: 5 min; sample: silicon 110; TEM image: TF20.

Remove hydrocarbon accumulation on semiconductor device

After cleaning with the Solarus II system, amorphous surface damage and crosslinking are eliminated. Protocol: hydrogen and oxygen; duration: 5 min; sample: a semiconductor device; SEM image.

In-situ Diffraction studies with the Rio 16

Study crystalline changes when you combine the diffraction, in-situ, and stage tilt capabilities. No artifacts in the individual images & no beam stop required. Record video at up to 160 fps (Rio 16).

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