Fully automated argon ion polishing system suitable for preparation of SEM samples to prepare damage free surfaces, cross sections and deposit coatings to protect or eliminate charging.
- Polish, etch or coat samples with a single pump down
- Etch at voltages as low as 100 V for rapid and damage free preparation of sample surfaces
- Permit samples as large as 32 mm in diameter
- Transfer samples from the PECS™ II instrument to a SEM/FIB or glovebox without exposure to air (optional)
- Store and analyze image in DigitalMicrograph® software from Gatan for digital optical imaging
- Display and control all PECS II parameters using integrated 10-inch color touch screen
Model 685
Datasheet
Applications
3D Microscopy and microanalysis of heterogeneous SEM samples by broad ion beam processing—Cutting, etching, coating
Advances in broad ion beam processing for 3D microscopy and microanalysis of ceramic composites
Advantages of broad ion beam (BIB) processing compared with focused ion beam (FIB) technology for 3D investigation of heterogeneous solids
Applications of ion beam slope cutting with the PECS system
Broad ion beam grid cutting with PECS system for 3D scanning electron microscopy and microanalysis of integrated circuits and layered structures
Combined ion beam preparation procedures for simultaneous investigation of surface and bulk properties by SEM
Ion beam etching applications in material characterization
Ion beam etching of metal composites using PECS system
Ion beam preparation procedures for three-dimensional SEM resolved Kikuchi (EBSD) and Kossel microdiffraction analysis of deformed metals
SEM Techniques using the Precision Etching and Coating System (PECS)
Protocols
Cleaning guns and cold cathode gauge
Related products
High resolution ion beam coater
Met-etch system
Gatan Microscopy Suite® Software
Ilion II System