PECS II System

Broad argon ion beam system designed to polish and coat samples for SEM imaging and analytical techniques.

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Fully automated argon ion polishing system suitable for preparation of SEM samples to prepare damage free surfaces, cross sections and deposit coatings to protect or eliminate charging.

  • Polish, etch or coat samples with a single pump down
  • Etch at voltages as low as 100 V for rapid and damage free preparation of sample surfaces 
  • Permit samples as large as 32 mm in diameter
  • Transfer samples from the PECS™ II instrument to a SEM/FIB or glovebox without exposure to air (optional)
  • Store and analyze image in DigitalMicrograph® software from Gatan for digital optical imaging
  • Display and control all PECS II parameters using integrated 10-inch color touch screen


Critical Reviews in Solid State and Materials Sciences

Zhou, T.; Babu, R. P.; Hou, Z.; Hedström, P.

Journal of Magnesium and Alloys

Liu, X. Q.; Qiao, X. G.; Pei, R. S.; Chi, Y. Q.; Yuan, L.; Zheng, M. Y.



Model 685





Damage-free preparation of a porous Zn alloy with a Cu coating

Removing the oxide layer from magnesium alloys to allow successful EBSD data collection

Specimen surface and thickness effects on EDS mapping

Optimizing the surface of multiphase Al alloys for successful EBSD analysis

Ion beam etching applications in material characterization

Interphase analysis in multiphase CoRe alloy

Advances in broad ion beam processing for 3D microscopy and microanalysis of ceramic composites 

SEM Techniques using the Precision Etching and Coating System (PECS)

Advantages of broad ion beam (BIB) processing compared with focused ion beam (FIB) technology for 3D investigation of heterogeneous solids

Applications of ion beam slope cutting with the PECS system

Broad ion beam grid cutting with PECS system for 3D scanning electron microscopy and microanalysis of integrated circuits and layered structures

Combined ion beam preparation procedures for simultaneous investigation of surface and bulk properties by SEM

Ion beam etching of metal composites using PECS system

3D Microscopy and microanalysis of heterogeneous SEM samples by broad ion beam processing—Cutting, etching, coating

Ion beam preparation procedures for three-dimensional SEM resolved Kikuchi (EBSD) and Kossel microdiffraction analysis of deformed metals


Cleaning guns and cold cathode gauge

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Ilion® II System



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